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聚乙烯促进低压气相金刚石成核的机理

聚乙烯促进低压气相金刚石成核的机理

ISSN:2095-9389
1994年第16卷第2期
王建军;吕反修;杨保雄 Wang Jianjun;Lu Fanxiu;Yang Baoxiong
北京科技大学材料科学与工程系, 北京 100083 Department of Materials Science and Engineering, USTB, Beijing 100083, PRC

研究了在微波等离子体化学气相沉积(MPCVD)条件下,聚乙烯对金刚石在单晶硅衬底上形核的影响.发现预先涂覆在硅衬底的聚乙烯显著地促进了金刚石的形核;提出了聚乙烯促进金刚石形核的机理和具有SP3杂化结构的含碳活化粒子过饱和度概念及其促进金刚石形核的观点.

Effect of polyethylene on low pressure diamond growth from the vapour phase was studied. It was found that diamond nucleation on polyethylene coated, un-polished single crystal silicon substrate was greatly enhanced. The mechanism of the observed enhancement and a new concept of the super-saturation of carbonaceous radicales with the SP3 hybridstructure which enhance the nucleation of diamond film have been proposed.

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ISSN:2095-9389
1994年第16卷第2期

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