MEMS技术是惯性技术未来主要的发展方向之一。本文介绍了国内外MEMS惯性仪表与系统的研究与应用概况,研究内容与关键技术,以及发展趋势。
MEMS is one of the main development directions of inertial technology in the future . This paper introduced domestic and international research and application status , research contents and key technique, and development trend of MEMS inertial sensor and system.