Nitride films of high entropy alloys fabricated based on the idea of multi-principal-element high entropy alloy have been found to possess high entropy effect, lattice distortion effect, and sluggish diffusion effect due to multielemental mixtures. This makes the new film system usually have a simple nanocrystalline or amorphous structures. Depending upon the composition and/or processing route, the nitride films of multi-principal-element high entropy alloy exhibit simple solid solution structure and excellent properties, and they have potential application in many areas. In this article, the development, microstructure, properties, proces-sing route and promising application of nitride films of high entropy alloys are summarized, and its directions of future research are also discussed.