Logo 知识与财富的链接
基于氧化铝陶瓷的无线无源高温压力传感器的设计与制备

基于氧化铝陶瓷的无线无源高温压力传感器的设计与制备

ISSN:1671-1815
2016年第16卷第2期
TP自动化技术、计算机技术
关洋,张晓明 Guan Yang and Zhang Xiao Ming
中北大学电子测试技术国防科技重点实验室,中北大学电子测试技术国防科技重点实验室 North University of China Science and Technology on Electronic Test Measurement Laboratory

设计并制备了一种基于氧化铝陶瓷的无线无源高温压力传感器。首先在常温、压力测试范围为0~0.4 MPa的设计条件下,利用ANSYS仿真软件对所设计的结构进行了力学模型的分析,得出方形氧化铝陶瓷的最大等效应力小于最大许用应力;之后从切片与冲孔、叠片与热压、高温烧结、丝网印刷与后烧等主要工艺步骤介绍了基于氧化铝陶瓷压力传感器的制备方法;最后对其进行了导通性测试。所制备的压力传感器可用于常温下的压力检测和高温下的性能研究。

The pressure sensor base on high temperature co-fired ceramic is widely used to harsh environment. This paper proposed and fabricated a wireless and passive high temperature pressure sensor base on Al2O3 ceramic. Firstly, in room temperature and pressure test range from 0 to 4 bar, the mechanical model of this sensor is analyzed with Ansys simulation software, the result is the maximum equivalent stress of square Al2O3 ceramic less than maximum allowable stress. Afterwards, this paper introduces the preparation method of Al2O3 ceramic pressure sensor, the technical process main include slice and punching, lamination and thermal pressure, high-temperature sintering, screen printing and post-fire. Finally, the sensor is measured for its conductivity. This pressure sensor has a good application for pressure measurement in room temperature for and performance research in high temperature.

认领
收 藏
点 赞
认领进度
0 %

发表评论

ISSN:1671-1815
2016年第16卷第2期
TP自动化技术、计算机技术

用户信息设置