知识与财富的链接
本文讨论了ULSI的发展对低介电常数(low-k)介质的需求,介绍了几种有实用价值的low-k介质的研究和发展现况,最后评述了low-k介质在ULSI中应用的前景.
In this Paper,the requirement of low k dielectric for developing ULSI is discussed.The current status of research and development for several promising and worthy low k dielectrics is introduced.Finally,the prospect on the application of low k dielectrics materials is reviewed.
